Dover Motion ZE™ Micro Linear Stage

Dover Motion’s ZE™ linear stages incorporate a 23-frame motor, typically either a stepper or servo, coupled to a lead screw which drives a cam-follower along a wedge. This type of design provides high-resoultion, whilst an anti-friction nut ensures excellent repeatability.

 

The ZE linear stages provide very straight, smooth and repeatable motion needed to satisfy demanding wafer inspection, scanning and probing applications. The precise and non-recirculating way in which each of the four corners keep pitch and yaw below 15 arc-seconds over full travel. Multiple travel options are available from 0.5 – 1.5 inches in a low profile design.

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