Airglide Air Bearing Linear XY Stage from Dover Motion

These units can be setup as an individual axis (with travel of 100 mm up to 1,000 mm) or stacked as an XY assembly with upper axis travels up to 400 mm. Additional vacuum and signal lines can also be made available on the stationary base plate, and routed to the top plate.

The Airglide also includes high flex cabling with standard termination points for single and XY configurations. This cabling system can greatly simplify external wiring for convenient integration.

A linear encoder is standard and available in several resolutions and accuracy grades.

Dover offers complete control packages, low profile Z-theta assemblies, and optional wafer chucks.

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