Heason Technology

Airglide Air Bearing Linear XY Stage from Dover MotionAirglide Air Bearing Linear XY Stage from Dover Motion

The Dover Airglide table combines the ultimate in performance, reliability and value. The stage design uses ultra precision air bearing ways providing extremely smooth motion, clean operation, and reliability. Its brushless linear servo motor allows for high speeds with no maintenance, making it ideal for use in high throughput applications.

These units can be setup as an individual axis (with travel of 100 mm up to 1,000 mm) or stacked as an XY assembly with upper axis travels up to 400 mm. Additional vacuum and signal lines can also be made available on the stationary base plate, and routed to the top plate.

The Airglide also includes high flex cabling with standard termination points for single and XY configurations. This cabling system can greatly simplify external wiring for convenient integration.

A linear encoder is standard and available in several resolutions and accuracy grades.

Dover offers complete control packages, low profile Z-theta assemblies, and optional wafer chucks.


Features

  • Specifications
  • Manuals
  • Downloads
  • Video
  • Precision machined components offer:
  • < 1 um Accuracy (with 2 pt. comp)
  • Velocity stability < 0.5% while scanning
  • Industry leading straightness (± 0.5 µm)
  • Air bearing and brushless linear motor provides maintenance free operation

Specifications

Videos

Manufacturing Partner

Airglide Air Bearing Linear XY Stage from Dover Motion

Manufacturer: Dover Motion | Category: Business & Industrial | Author: Heason Technology | Product Code: Airglide Air Bearing Linear XY Stage


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Heason Technology Limited
Motion Solutions Centre
Spring Copse Business Park
Slinfold
West Sussex
RH13 0SZ UK

Tel: +44 (0) 1403 792 300
Email: sales@heason.com

Heason Technology
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