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Tripod and Hexapod Micro Positioners from Alio
Date: 05 June 2007
Alio's Tripod and Hexapod Micro Positioners are precisely aimed at nano positioning applications
With backlash free resolutions to 5
nanometres, speeds to 200 mm/sec and an effective positioning
envelope between 15 mm3 and 200 mm3, Alio
Industries 3- and 6-degrees of freedom tripod and hexapod robotic
manipulators provide the enabling technology for demanding
ultra-high precision motion systems.
Used as nano positioners for production, test and research
applications in photonics, semiconductor, MEMS and many other high
technology industries, Alio's AI series tripods and hexapods,
available exclusively in the UK from Heason Technologies, combine
parallel kinematics principles with ceramic servo motors and high
resolution encoder feedback systems. Smooth and precise linear
motion and total rigidity of each positioning element is assured
with ultra-precision cross roller bearing based mechanics. The
micro positioner features Hephaist® spherical rolling
joints at both the support base and the moving table ensuring
backlash-free performance.
Standard equipment for the complete range includes Delta Tau motion
controllers with forward and inverse kinematics, and interpolation
algorithms built-in; users simply program the actual position of a
"tool centre point" as individual position coordinates or as
contoured moves.
The tool centre point is simply positioned anywhere within the
positioning envelope in X Y Z coordinates.
Parallel kinematics micro positioners provide extremely rigid
platforms with increased repeatability over traditional serial
kinematics stacked linear and rotary stages where runout and tilt
errors are prone to accumulate. The Alio AI hexapod and tripod also
allows simpler cabling for motor, feedback and other services and
the lower inertia design has faster acceleration performance and
very often a smaller footprint and overall envelope.
The load carrying capability for the AI hexapod is from 0.25 kg to
20 kg (up to 8 kg for the tripod version). Both designs have a
repeatability of just 50 nanometres as standard which may be
upgraded to 10 nanometres with an optional low-noise DC mode
amplifier.
Alio Industries can provide customised designs and application
software including a Windows® PC with robotic GUI and
all units may be supplied to class 10 or class 100 compatible clean
room standards
or with 10-10 Torr vacuum preparation.
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information on this exciting product.