Piezo Ceramic Motor Direct Drive Stages
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Nanomotion Applications | Due to the intrinsic characteristics of piezoelectric materials, there are numerous applications that benefit from their use, visit this tab to see some examples |
Standard BS Series of Linear Stages
- Compact stage design with low profile.
- Travel Ranges: 20,40,50,60,75,100,150 and 200mm
- Linear encoder mounted in the center for optimum positioning
- Optional encoder resolutions: 1µm, 0.5µm ,0.1µm, 50nm, 10nm
- Easily configurable in multi-axis
- High Vacuum and UHV Options
Please down load nanomotion catalogue for full product drawings and specifications at the base of this page.
Auto Focus & Scanning Stage
- Ceramic Servo Motor with Travel to 25mm
- High Resolution from 10nm to 100nm (1nm optional)
- Zero Backlash with Direct Drive
- High Speed Move & Settle for Focusing Operation
- Superior Position Stability and Zero Power Consumption at Rest
- Position Holding without Power Provides Optical Stability and Reduces Thermal Drift
- Easy Add-on Mounting to Standard Microscopes
Please down load nanomotion catalogue for full product drawings and specifications at the base of this page.
Long Travel Stages
This long travel, closed loop stage is easily configured for motion up to 4 meters in length. The assembly consists of a profile linear rail with re-circulating ball bearings mounted to an aluminium extrusion. A linear tape scale encoder is used for position feedback and the stage is driven with an HR8 motor providing 40N of force.
This is only one example, call us to discuss your travel and force requirements.
Multi Axis Custom Solutions
A four axis vacuum rated assembly, providing motion in X/Y/Z and Theta orientations, is used for laser etching. The assembly is vacuum rated to 10-7 Torr and uses non-magnet motors. The Z axis uses a spring counter balance to offset the vertical load and all stainless steel crossed roller axes use an anti-migration device in the bearing structure. This assembly provides 40mm travel in X & Y axes, 25mm travel in Z and up to 90 degrees in Theta.
This is only one example, call us to discuss your custom system.
Multi Axis systems built from standard stages
Picture shows a 5 axis assembly utilizing standard stages, XY linear, Z linear, theta-phi goniometer motion.
This is only one example, call us to discuss your multi-axis configuration.
Watch a multi axis assembly in action: Click Here
Standard FBZ Z-wedge stage
Nanomotion's Z-wedge stage utilizes crossed roller bearings on an incline to drive a center wedge through a top and bottom plate that coupled together. This horizontal motion results in pure vertical translation of the top surface of the stage. Using a Z-wedge configuration facilitates easy access over the entire surface and from all sides. Linear position encoding is done directly on the vertical translation eliminating any errors from the angle of the wedge.
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10mm travel
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Horizontal drive for vertical translation
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Direct position feedback with resolution from 100nm to 5 nm
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Load Capacity to 2kg
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Unobstructed work surface
- Larger Z wedge stages available
Please down load nanomotion catalogue for full product drawings and specifications at the base of this page.
Standard FBG Series Goniometer
Nanomotion's FBG Series geniometer stages provide tilting motion about a pivot axis above the stage. The stage design provides the ability to couple two axes together to tip and tilt around a common pivot axis. The geniometer stages use a direct optical encoder with a tape scale on the curved surface, providing resolution down to 1 arc second.
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4 available pivot axes to combine tip/tilt. 71, 96, 102 and 137mm pivot point options.
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Range of encoder resolutions available.
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Easily configured with any "FB" Series axes.
Please down load nanomotion catalogue for full product drawings and specifications at the base of this page.








