Ultra High Precision Linear Motor Driven Stages

Mini-MAG (MMG) Line of Positioning Products

Ultra Compact Linear Motor Stages

Mini-Mag Stages deliver nearly twice the accuracy at virtually the same cost as competitive standard-grade options. Lead times of two weeks or less facilitate reduced-time-to-market for equipment manufacturers or provide greater machine uptime for end users in production environments. The MMG will help you to build a better machine - Faster.

• Travels available from 25mm-150mm

• Ideal for high speed step and settle or constant velocity applications

• Available with integral counterbalance for vertical applications

• Anti-creep cross roller ways standard

• Adjustable end of travel limits

• All stainless steel construction

• Motor peak force: 35N

Please down load Data Sheets at the base of this page for full product options and specifications

MAG Moving Magnet Linear Motor Stage

Linear Motor Stage

The DM-Dover MAG linear motor stage is a very compact, high performance, direct drive table suitable for use in a wide range of applications.The integral iron core direct drive linear motor features up to 5G acceleration and a peak force generation of 170N. Its high acceleration and force generation make it an ideal candidate for demanding life sciences, photonics, semiconductor, and disk positioning applications.

MAG stages are very compact; measuring 50mm tall by 150mm wide.Any two versions will bolt directly together to form a very stiff, compact X-Y assembly, without the need of adapter plates. MAG stages employ a moving magnet design, which locates all cables and connectors in the stationary base.The resulting absence of moving cable is clean and compact and eliminates motion errors due to cable forces.The precision ground cross roller way provide high stiffness together with smooth motion, and are capable of supporting torque's due to offset loads. Cage creep is eliminated through the use of geared cage assemblies. The built-in encoder is available with resolutions from 1 micron down to 50nm. Standard travels range from 50mm to 300mm in increments of 50mm.

• Compact design

• No moving cables

• High acceleration

• Ideal for point-to-point moves

Please down load Data Sheets at the base of this page for full product options and specifications

NanoSlide-20 Linear Motor Stage

Linear Motor Table

Danaher Motion-Dover's NanoSlide-20 linear motor table is a very compact, high performance, direct drive stage suitable for use in a wide range of applications, including photonic alignment and automation. The integral, center drive linear motor features an advanced magnetic design that supports up to 3G acceleration and 44N force generation and its single phase coil allows the use of simple brush type amplifiers.

The NanoSlide-20 stage has a very low profile of 35mm and with overall dimensions of only 150mm square. Two of these stages bolt directly together to form a very stiff, compact X-Y assembly, without the need for adapter plates.

The NanoSlide-20 table uses a unique moving magnet, moving encoder design, which locates all electrical connectors in the stationary stage base. The resulting absence of moving cables is clean and compact and eliminates motion errors due to cable forces. The precision ground crossed roller ways provide high stiffness together with smooth motion, and are capable of supporting torques due to offset loads.

Cage creep is eliminated through the use of geared cage assemblies. The built-in encoder is available with resolutions of 1 micron and 0.1 micron, which are directly output in digital quadrature format together with a unique index output. For high resolution applications, an analog sine/cosine output version supports 5 nanometer resolution.

• Compact, low profile, direct drive stage

• Stationary connectors; no moving cables

• Smooth, stiff crossed roller ways

• High performance, single phase linear motor

• Resolutions from 5 nanometers to 1 micron

• Units stack directly to form X-Y assemblies

Please down load Data Sheets at the base of this page for full product options and specifications

SAS Recirculating Way Table

Linear Motor Shuttle Stage

The SAS Series single-axis shuttle stages provide high speed in a very compact design. The stage design uses recirculating bearings to minimize the overall moving envelope. Its brushless linear servo motor allows high speeds with smooth positioning, making it ideal for use in high throughput scanning applications.

A linear encoder is standard and available in several resolutions. The bearings and lubricants have been optimized for low and uniform moving friction. Standard units include flexible bellows. This unit's cabling terminates on a static base plate, simplifying external wiring for convenient integration. Vacuum and signal lines can also be made available on the stationary base plate, and routed to the top plate. These units can be conveniently stacked into an X-Y configuration with 15 arc-second orthogonality.

• Ideal for scanning and step and repeat applications

• High speed linear motor

• Space-saving shuttle design

Please down load Data Sheets at the base of this page for full product options and specifications

Mini-Mag (MMG-AL)

Mini-Mag (MMG-AL) is the aluminium member of the Mini-Mag family of stages. Its light weight aluminium construction reduces the complexity and cost.

• Travels available from 25mm-150mm
• Resolution options down to 5nm

• Ideal for High Throughput Imaging applications

• Anti-creep cross roller ways standard

• Minimized moving mass for higher bandwidth

• Aluminum construction reduces complexity and cost. Allows vertical orientation without counterbalance

• Single Phase motor option reduces amplifier complexity and cost

• Extremely compact footprint reducing instrument footprint (25mm travel - 105mm x 80mm x 25mm)