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RC3 Vacuum Ceramic Servo Motor


RC3 High Precision Ceramic Motors

RC3 motors are high precision ceramic motors.  These motors combine unlimited stroke with high resolution, all in a compact package.  RC3 motors provide a linear response to the input voltage.  The operation of the motor and driver resembles that of a DC-motor driven by a voltage amplifier.

The RC3-HV and RC3-UHV motors are constructed of materials that have been selected and designed for high vacuum compatibility.

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Performance Specification

Maximum Velocity: 180 [mm/sec] (min)
Dynamic Stall Force: 12 [N] (min)
Force @ 80 mm/sec: 8.5 [N] (min)
Non-Energized Stiffness: 1.8 [N/µ] (min) (less for HV motor)
Nominal Preload on Stage: 50 [N]
Kf: 2.7 ±40% [N/Volt command]
Kfv: 50 ±20% [N · sec/m]
Offset: 1 to 2 [V]
Attainable Resolution: Better than 100nm
Nominal Lifetime: 20,000 hours under nominal operating conditions

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Electrical Specification

Maximal Voltage: 280Vrms 40.5KHz, sine wave
Maximal Current Consumption: 270mA rms ± 30mA
Maximal Power Consumption: 17W ± 2W (zero W at hold)
Electrical Connection: 4 contact edge connector on FPC

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Environmental Specification

Ambient Temperature: 0 - 50°C
Storage: -20°C - +70°C
Humidity: 0 - 80% non condensing
Vacuum level (ultra-high-vacuum motors): 10-10 Torr (guaranteed only after baking)
Maximal Baking Temperature: 140ºC

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Physical Specification

Diameter: 21mm
Length: 41.7mm
Weight: 34 gr

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