RC3 Vacuum Ceramic Servo Motor
RC3 High Precision Ceramic Motors
RC3 motors are high precision ceramic motors. These motors
combine unlimited stroke with high resolution, all in a compact
package. RC3 motors provide a linear response to the input
voltage. The operation of the motor and driver resembles that
of a DC-motor driven by a voltage amplifier.
The RC3-HV and RC3-UHV motors are constructed of materials that
have been selected and designed for high vacuum compatibility.
Performance Specification
Maximum Velocity: 180 [mm/sec] (min)
Dynamic Stall Force: 12 [N] (min)
Force @ 80 mm/sec: 8.5 [N] (min)
Non-Energized Stiffness: 1.8 [N/µ] (min) (less for HV motor)
Nominal Preload on Stage: 50 [N]
Kf: 2.7 ±40% [N/Volt command]
Kfv: 50 ±20% [N · sec/m]
Offset: 1 to 2 [V]
Attainable Resolution: Better than 100nm
Nominal Lifetime: 20,000 hours under nominal operating
conditions
Electrical Specification
Maximal Voltage: 280Vrms 40.5KHz, sine wave
Maximal Current Consumption: 270mA rms ± 30mA
Maximal Power Consumption: 17W ± 2W (zero W at hold)
Electrical Connection: 4 contact edge connector on FPC
Environmental Specification
Ambient Temperature: 0 - 50°C
Storage: -20°C - +70°C
Humidity: 0 - 80% non condensing
Vacuum level (ultra-high-vacuum motors): 10-10 Torr (guaranteed
only after baking)
Maximal Baking Temperature: 140ºC
Physical Specification
Diameter: 21mm
Length: 41.7mm
Weight: 34 gr








