Air Bearing XY Table

The Nano Precision Planar Air Bearing System has raised the bar to a new level of performance for air bearing motion. This engineered system was designed to exceed today's demanding requirements in semiconductor wafer, flat panel display, nano-manufacturing and optical inspection.

The Advantages:

• Planar Air Bearing for Superior Flatness (No Beam Sag)
• Advance Ceramic Servo Motors or High Force Linear Motors
• Decoupled Thermal Influences
• Travel Options Over a Meter
• Dual Y Axis Motion Control for Sub Arc Second Yaw Control
• Resolution: 5nm Standard, 38 pico-meter with Laser Interferometer
• No Servo Dither (no oscillation)
• No Hysteresis
• No Backlash
• Fast settling time

Air Bearing Design

The three point vacuum preloaded air bearings of the platen ride directly on the granite surface for superior flatness of travel. There is no opportunity for the load to cause sag. This design also decouples any thermal propagation generated by the motors from the platen.

Motor Drive

Heason offers both advanced ceramic servo motors or ironless core linear motors on our air bearing systems. The ceramic servo motors offer nanometer level motion control while the linear motors offer high force and high speed.

Position Feedback

High resolution linear optical encoders come standard with resolutions down to 5nm. Laser interferometer closed loop motion control feedback is also available for 38 picometer resolution.