UHV Four Axis Stage

Four Axis Ultra High Vacuum Stage

Heason Tecnhologies designed and build a four axis ultra high vacuum stages for semi-conductor wafer surface analysis and inspection application by leading global instrument builder.

X & Y Axes are driven by ceramic servo motors and the Z & Theta axes are driven by UHV compatible stepper motors.  X, Y & Z are encoded with 100 Nanometre optical scales

Environmental specifications

Operating pressure 9x10-10mb
Bake out temperature 120°C

Strokes & Travel

X Travel - 315mm
Y Travel - 315mm
Z Travel  - 25mm
Theta - Continuous

Speeds and Accelerations

X and Y
Minimum speed  30mm/second
Accelerate from 0-30mm/second in 2 seconds
Z
Minimum linear speed 1.5mm/second
Accelerate from 0-1.5mm/second in 1 second

Accuracy

X and Y Axis Better Than 5 Microns

Repeatability

X and Y Axis Better Than 1 Micron