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Low Profile Series
Low Profile XY and X Theta Stages
XYMRT Microscope Stage: The Microscope Stage
brings automated, highly accurate X-Y positioning to a wide range
of microscope-based applications including wafer, mask, and die
inspection; cell counting and analysis; video profilometry;
etc.
X-ThetaT Stage:The Low Profile X-Theta Stage
provides two axes of motion in a stage body height of only 1.2
inches, making it ideal for various inspection applications,
including wafer, CD, and hard drive media.
The Microscope Stage brings automated, highly accurate X-Y positioning to a wide range of microscope-based applications including wafer, mask, and die inspection; cell counting and analysis; video profilometry; etc.
- Super-thin cross section
- 3" diameter clear aperture for transmissive applications (solid top also available)
- Precision crossed-roller ways
- 6" x 6" travel
- High repeatability friction nuts
The Low Profile X-Theta Stage provides two axes of motion in a stage body height of only 1.2 inches, making it ideal for various inspection applications, including wafer, CD, and hard drive media.
- Very thin cross section - only 1.2" high
- Precision crossedroller ways on linear axis
- High speed beltdriven theta axis
Related Documents
| Title | Description | Size | Type | Download |
|---|---|---|---|---|
| XYMR Microscope Stage Technical Bulletin | Technical Bulletin for XYMR Microscope Stage | 97 KB | Portable Document Format (Adobe Acrobat) |
|
| XYMR-8080 MicroScope Stage Dimension | Dimension Drawing for XYMR-8080 MicroScope Stage | 131 KB | Portable Document Format (Adobe Acrobat) |
|
| X-Theta Low Profile Stage Dimension | Dimension Drawing for X-Theta Low Profile Stage | 104 KB | Portable Document Format (Adobe Acrobat) |
|
| High Performance Positioning Systems for Flat Panel Display Manufacturing | High Performance Positioning Systems for Flat Panel Display Manufacturing | 235 KB | Portable Document Format (Adobe Acrobat) |
|
| Precision Positioning Systems Capabilities Brochure | Precision Positioning Systems Capabilities Brochure | 490 KB | Portable Document Format (Adobe Acrobat) |
|
| X-Theta Low Profile Stage Technical Bulletin | Technical Bulletin for X-Theta Low Profile Stage | 113 KB | Portable Document Format (Adobe Acrobat) |
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