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AirGlide
AirGlide Air Bearing Stage
NEAT's AirGlide air bearing stage is ideal for scanning applications with ultra-smooth linear motion of ± 200 nanometers at 5 mm/second.
- Virtually unlimited service life without particle generation
- Super low velocity ripple - ideal for scanning applications
- High air bearing accuracy
- Exceptional pitch and roll stiffness provide stability
Related Documents
| Title | Description | Size | Type | Download |
|---|---|---|---|---|
| Airglide brochure 2011 | Technical Brochure | 1204 KB | Portable Document Format (Adobe Acrobat) |
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| Airglide app note Rev D | Airglide Application Note Rev D | 308 KB | Portable Document Format (Adobe Acrobat) |
|
| Airglide Datasheet Rev C | Airglide Datasheet Rev C | 363 KB | Portable Document Format (Adobe Acrobat) |
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| High Performance Positioning Systems for Flat Panel Display Manufacturing | High Performance Positioning Systems for Flat Panel Display Manufacturing | 235 KB | Portable Document Format (Adobe Acrobat) |
|
| Precision Positioning Systems Capabilities Brochure | Precision Positioning Systems Capabilities Brochure | 490 KB | Portable Document Format (Adobe Acrobat) |
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| Danaher Precision Systems 2002 Product Catalog | Year 2002 Product Catalog for Danaher Precision Systems | 6 MB | Portable Document Format (Adobe Acrobat) |
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