Super High Precision Performance Air-Bearing Stages

AirGlide Ultra Precise Air Bearing Stage

The Dover AirGlide series combines the ultimate in performance, reliability and value. The stage design uses ultra precision air bearing ways providing extremely smooth motion, clean operation, and reliability. Its brushless linear servo motor allows for high speeds with no maintenance, making it ideal for use in high throughput applications. These units can be setup as an individual axis or stacked as an XY assembly with upper axis travels up to 350mm. Special 1000mm travel solutions. Additional vacuum and signal lines can also be made available on the stationary base plate, and routed to the top plate. The AirGlide also includes high flex cabling with standard termination points for single and XY configurations. This cabling system can greatly simplify external wiring for convenient integration. A linear encoder is standard and available in several resolutions and accuracy grades. Dover offers complete control packages, low profile Z-theta assemblies, and optional wafer chucks.

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FiberBea Linear Motor Positioner

Bearing, Linear Motor Positioner

The FiberBeam Family of Linear Motor Positioners are specifically designed to meet the demands of photonic alignment and assembly systems. With travels of 20, 50, and 100mm, all share a very low profile of only 50mm.
FiberBeam Linear Motor Positioners incorporate a unique moving magnet/moving glass design which locates all cables and connectors in a stationary base, avoiding any cable influence on stage movement. Design simplicity makes these positioners ideally suited to cleanroom applications: the carriage floats over a featureless, precision-ground base. For high-resolution applications demanding rapid settling, the FiberBeam Stages are an ideal match to our NanoDrive Linear Amplifier series of ultra-low noise and low distortion sinusoidal amplifiers. The FiberBeam Stages incorporate proprietary porous bearing technology, avoiding the clogging problems common to orifice bearing designs. All models bolt together directly to form X-Y assemblies without the need for adapter plates. The height of such a stack is a low 100mm. Right angle brackets and frictionless spring or air counterbalances are available to permit vertical operation. This allows three axis X-Y-Z assemblies to be easily configured. Dual carriage/single base versions can also be supplied, where the motion of the two carriages is parallel to less than 2 arc-seconds. In constant velocity applications, tracking errors during motion can be held to +/- 10 nanometers. The use of a single phase, brushless motor in the FiberBeam 20 stage provides the high performance of sinusoidal commutation from brush-type amplifiers no commutation required.

• Non-contact air bearing, linear motor stage

• Non-contact optical encoder with resolutions to 1 nanometer

• 1 micron move and settle times of 15 ms to within 20 nanometers

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MAB-100 Linear Motor Stage

MAB-100 Linear Motor Stage

The MAB-100 linear motor stage uses an air bearing guideway that delivers extremely precise straight-line motion with a total absence of friction. Motion artifacts due to recirculating bearings or anticreep mechanisms are wholly eliminated by the noncontact, air bearing design. This small, compact design is suitable for use in a wide range of applications in the Life Sciences, Data Storage, Semiconductor, and other market segments.

The MAB-100 is driven by a non-contact, brushless servo motor with a unique moving magnet design that eliminates moving motor cables. The overall travel is 100 mm; pitch and yaw are held to less than +/- 7 uradians (+/-1.5 arc-second); and flatness and straightness are held to under +/- 200 nanometers. Position feedback is provided by a linear optical encoder with a resolution of up to 5 nanometers. The encoder includes an index signal enabling precise position registration upon power-up. The read head is mounted on a stationary base, eliminating any need for moving cables. A pair of built-in, adjustable limit switches provide end of travel sensing, and rubber stops provide additional protection.

With a totally non-contact complement of air bearing guideway, linear motor, encoder, and limit switches, the MAB-100 stage is incapable of generating particles, and will meet (with appropriate input air filtration) Class 1 cleanroom standards.

The MAB-100 is also available with an embedded, high performance drive and control. Adding a mere 58mm to the overall length, this version (MAB-100/HRC) provides a completely integrated "Smart Stage", requiring only an external +24 VDC power supply and an RS-232 serial link for communication. The MAB-100/HRC can function either as an intelligent slave to a host computer over the serial interface, or it can be preprogrammed to auto-run sophisticated motion sequences as a standalone device. The MAB-100/HRC model features a 4096X encoder interpolation, providing a resolution of 5 nanometers.

• Reduced cost of ownership

• Reduced machine down time

• Air bearing guide reduces wear

• No requirement for periodic lubrication

• Operates on very low air pressure and low amplifier bus voltages

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AirBeamT-Single Axis Shuttlle

Linear Motor Air Bearing Stage

The AirBeam Series is ideal for Computer-To-Plate systems, photoplotters, wafer scanning systems, and factory automation applications. It provides straight, stiff, cog-free motion at resolutions less than a micron. The AirBeam combines breakthrough linear servo motor technology and an ultrasmooth air bearing way in a single structural beam. The linear motor and modular, serviceable moving cable set are uniquely mounted inside the main beam, minimizing particulate generation. The integral linear motor allows carriage speeds up to 1 meter per second, and accelerations up to 1 G. The linear encoder mounts just below the upper surface, minimizing Abbé error. A laser interferometer option is available for particularly demanding OEM applications with resolution down to 2.5 nanometers. Since the air bearing carriage, linear motor, and linear encoder are non-contact devices, the AirBeam provides virtually unlimited life without particle generation.

Danaher Motion-Dover's unique clog-free air bearing technology provides superior reliability while eliminating costly filtration requirements, and requires minimal air consumption. The AirBeam series mounts via 3 points, eliminating degradation of positioning accuracy due to imperfect mounting surfaces. Locking, D sub-mini connectors with strain-relieved cables mount on the box beam end plate to provide convenient access to motor and limit/encoder signals. An auxiliary connector is provided for user signals, and terminates on the air bearing moving carriage. Please contact one of our Applications Engineers when high stability is needed. An optional solenoid may be added which rapidly disables compressed air to the moving carriage, resulting in a "Coulomb welded" state. In this state, motion between the spar and carriage is eliminated at the atomic level, and the only relative movement is due to thermal phenomena.

• Ultra-smooth - ideal for scanning applications

• Virtually unlimited service life without particle generation

• High speed linear motor

• Air bearing accuracy

• Internal cables

• Clog-free air bearing technology

Please down load Data Sheets at the base of this page for full product options and specifications