Piezo Ceramic Motor Driven Linear Stages

Product Description:

Linear stages with nanometer repeatability's are available from our standard product offering or designed for custom solutions utilizing our core technology. These products can be interfaced to customer controllers or ordered with motion controllers and hardware. Stages are available for end user and OEM applications in atmospheric, clean room and vacuum environments requiring extremely precise movement with over 40,000 hour MTBF.

Product Features:

Enclosed Motor Stages

Model	Stroke	Force	Dimensions
AI-2500	25 mm	8 N	93/82/36 mm
AI-5000	50 mm	8 N	135/93/36 mm
AI-10000	100 mm	16 N	174/102/40 mm
AI-15000	150 mm	16 N	264/102/40 mm
AI-20000	200 mm	16 N	334/102/45 mm
AI-30000	300 mm	32 N	460/155/55 mm
AI-40000	400 mm	32 N	715/175/65 mm

External Motor Stages

Model	Stroke	Force	Dimensions
AI-HR1-1200E	12 mm	3.5 N	65/90/25 mm
AI-HR2-1200E	12 mm	8 N	65/90/25 mm
AI-D2-1200E	12 mm	16 N	65/118/25 mm
AI-HR2-2500E	25 mm	8 N	88/114/32.5 mm
AI-HR4-2500E	25 mm	16 N	88/114/32.5 mm
AI-D4-2500E	25 mm	32 N	88/140/32.5 mm
AI-D8-2500E	25 mm	64 N	88/140/42.5 mm
AI-HR-5000E	50 mm	8 N	100/114/34 mm
AI-HR4-5000E	50 mm	16 N	100/114/34 mm
AI-D4-5000E	50 mm	32 N	100/135/34 mm
AI-D8-5000E	50 mm	64 N	155/140/44 mm
AI-HR4-15000E	150 mm	16 N	255/138/34 mm
AI-D4-15000E	150 mm	32 N	255/160/34 mm
AI-D8-15000E	150 mm	64 N	255/160/44 mm
AI-HR4-20000E	200 mm	16 N	330/138/40 mm
AI-D4-20000E	200 mm	32 N	330/160/40 mm
AI-D8-20000E	200 mm	64 N	330/160/50 mm
AI-D4-30000E	300 mm	32 N	485/164/45 mm
AI-D8-30000E	300 mm	64 N	485/190/55 mm
AI-D4-40000E	400 mm	32 N	610/200/55 mm
AI-D8-40000E	400 mm	64 N	610/200/65 mm

Linear Stage Precision Choices

Encoder Interpolated Resolution	Repeatability	Velocity
5 nm motion controller	10 nm	150 mm/ sec
10 nm Renishaw	20 nm	80 mm/ sec
20 nm Renishaw	40 nm	110 mm/ sec
50 nm Renishaw	100 nm	250 mm/ sec
100 nm Renishaw	200 nm	250 mm/ sec
500 nm Renishaw	1 micron	250 mm/ sec
1 micron Renishaw	2 micron	250 mm/ sec
5 micron Renishaw	10 micron	250 mm/ sec

Related Documents

Title	Description	Size	Type
AI-HR4-2500E Datasheet	Piezo-ceramic motor driven linear stage model AI-HR4-2500E. Document Revision 004	233 KB	Portable Document Format (Adobe Acrobat)
AI-HR8-2500E Datasheet	Piezo-ceramic motor driven linear stage model AI-HR8-2500E. Document Revision 004	239 KB	Portable Document Format (Adobe Acrobat)
Linear Stage Brochure	Brochure for Piezo-Ceramic Motor Driven Linear Stage	268 KB	Portable Document Format (Adobe Acrobat)
AI-HR4-10000E Datasheet	Piezo-ceramic motor driven linear stage model AI-HR4-10000E. Document Revision 002	245 KB	Portable Document Format (Adobe Acrobat)
AI-HR4-10000E-XY Datasheet	Piezo-ceramic motor driven linear stage model AI-HR4-10000E-XY. Document Revision 002	279 KB	Portable Document Format (Adobe Acrobat)
AI-HR4-15000E Datasheet	Piezo-ceramic motor driven linear stage model AI-HR4-15000E. Document Revision 001	239 KB	Portable Document Format (Adobe Acrobat)
AI-D8-5000E Datasheet	Piezo-ceramic motor driven linear stage model AI-D8-5000E. Document Revision 004	252 KB	Portable Document Format (Adobe Acrobat)
AI-HR2-1200E Datasheet	Piezo-ceramic motor driven linear stage model AI-HR2-1200E. Document Revision 004	266 KB	Portable Document Format (Adobe Acrobat)
AI-HR2-5000E Datasheet	Piezo-ceramic motor driven linear stage model AI-HR2-5000E. Document Revision 005	242 KB	Portable Document Format (Adobe Acrobat)
AI-D4-2500E Datasheet	Piezo-ceramic motor driven linear stage model AI-D4-2500E. Document Revision 004	229 KB	Portable Document Format (Adobe Acrobat)
AI-D8-15000E Datasheet	Piezo-ceramic motor driven linear stage model AI-D8-15000E. Document Revision 001	342 KB	Portable Document Format (Adobe Acrobat)
AI-D8-2500E Datasheet	Piezo-ceramic motor driven linear stage model AI-D8-2500E. Document Revision 004	233 KB	Portable Document Format (Adobe Acrobat)
AI-D4-10000E Datasheet	Piezo-ceramic motor driven linear stage model AI-D4-10000E. Document Revision 002	250 KB	Portable Document Format (Adobe Acrobat)
AI-D4-10000E-XY Datasheet	Piezo-ceramic motor driven linear stage model AI-D4-10000E-XY. Document Revision 002	284 KB	Portable Document Format (Adobe Acrobat)
AI-D4-15000E Datasheet	Piezo-ceramic motor driven linear stage model AI-D4-15000E. Document Revision 001	259 KB	Portable Document Format (Adobe Acrobat)
AI-D2-1200E Datasheet	Piezo-ceramic motor driven linear stage model AI-D2-1200E. Document Revision 002	251 KB	Portable Document Format (Adobe Acrobat)
AI-1200E-XY Datasheet	Piezo-ceramic motor driven linear stage model AI-1200E-XY. Document Revision 003	273 KB	Portable Document Format (Adobe Acrobat)
AI-D2-1200E-XY Datasheet	Piezo-ceramic motor driven linear stage model AI-D2-1200E-XY. Document Revision 002	295 KB	Portable Document Format (Adobe Acrobat)
AI-30000M Datasheet	Piezo-ceramic motor driven linear stage model AI-30000M. Document Revision 002	207 KB	Portable Document Format (Adobe Acrobat)
AI-D4-5000E Datasheet	Piezo-ceramic motor driven linear stage model AI-D4-5000E. Document Revision 004	225 KB	Portable Document Format (Adobe Acrobat)
AI-1200E Datasheet	Piezo-ceramic motor driven linear stage model AI-1200E. Document Revision 003	268 KB	Portable Document Format (Adobe Acrobat)
AI-2500 Datasheet	Piezo-ceramic motor driven linear stage model AI-2500. Document Revision 003	217 KB	Portable Document Format (Adobe Acrobat)
AI-5000 Datasheet	Piezo-ceramic motor driven linear stage model AI-5000. Document Revision 003	217 KB	Portable Document Format (Adobe Acrobat)
AI-HR4-10000 Datasheet	Piezo-ceramic motor driven linear stage model AI-HR4-10000. Document Revision 001	250 KB	Portable Document Format (Adobe Acrobat)

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Piezo Ceramic Motor Driven Linear Stages

Product Description:

Product Features:

Related Documents