Piezo Ceramic Rotary Stages - Heason Technology Ltd

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Piezo Ceramic Rotary Stages

Address:

Unit 6,
Lawson Hunt Industrial Park
Guildford Road
Broadbridge Heath
Horsham
West Sussex
RH12 3JR
UNITED KINGDOM

Telephone +44 (0)1403 755800
Fax +44 (0)1403 755810

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Product Description:

Theta stages with nanometer repeatability's are available from our standard product offering or designed for custom solutions utilizing our core technology. These products can be interfaced to customer controllers or ordered with motion controllers and hardware. Stages are available for end user and OEM applications in atmospheric, clean room and vacuum environments requiring extremely precise movement with over 40,000 hour MTBF.

Product Features:

Model	Rotation	Resolution	Velocity	Dimensions
AI-40R-D	360 deg	0.03 arc sec	360 deg/sec	60 dia / 35 ht. mm
AI-80R	360 deg	0.06 arc sec	>180 deg/sec	100 dia. / 30 ht. mm
AI-133R	360 deg	0.06 arc sec	360 deg/sec	133 dia. / 65 ht. mm
AI-105G	360/180 deg	0.08 arc sec	180 deg/sec	133 dia. / 157 ht. mm
AI-133G	360/180 deg	0.08 arc sec	180 deg/sec	133 dia. / 183 ht. mm

Linear Stage Precision Choices

Encoder Interpolated Resolution	Repeatability	Velocity
5 nm motion controller	10 nm	150 mm/ sec
10 nm Renishaw	20 nm	80 mm/ sec
20 nm Renishaw	40 nm	110 mm/ sec
50 nm Renishaw	100 nm	250 mm/ sec
100 nm Renishaw	200 nm	250 mm/ sec
500 nm Renishaw	1 micron	250 mm/ sec
1 micron Renishaw	2 micron	250 mm/ sec
5 micron Renishaw	10 micron	250 mm/ sec

Related Documents

Title	Description	Size	Type
AI-80R-D Datasheet	Piezo-ceramic motor driven linear stage model AI-80R-D. Document Revision 003	251 KB	Portable Document Format (Adobe Acrobat)
AI-80R-Q Datasheet	Piezo-ceramic motor driven rotary stage model AI-80R-Q. Document Revision 003	358 KB	Portable Document Format (Adobe Acrobat)
Rotary Stages Brochure 9-2004	Brochure for Rotary Stages. Date: 9-2004	285 KB	Portable Document Format (Adobe Acrobat)
AI-40R Datasheet	Piezo-ceramic motor driven rotary stage model AI-40R. Document Revision 002	263 KB	Portable Document Format (Adobe Acrobat)
AI-40R-D Datasheet	Piezo-ceramic motor driven rotary stage model AI-40R-D. Document Revision 002	266 KB	Portable Document Format (Adobe Acrobat)
AI-80R Datasheet	Piezo-ceramic motor driven rotary stage model AI-80R. Document Revision 003	354 KB	Portable Document Format (Adobe Acrobat)
AI-133R Datasheet	Piezo-ceramic motor driven rotary stage model AI-133R-D. Document Revision 001	335 KB	Portable Document Format (Adobe Acrobat)
AI-133R-D Datasheet	Piezo-ceramic motor driven rotary stage model AI-133R-D. Document Revision 001	334 KB	Portable Document Format (Adobe Acrobat)
AI-133R-Q Datasheet	Piezo-ceramic motor driven rotary stage model AI-133R-Q. Document Revision 001	336 KB	Portable Document Format (Adobe Acrobat)