+44 (0)1403 755800
+44 (0)1403 755810
High Precision Z Travel Stages
Sub Categories
|
Sub Categories | Description |
|---|---|---|
|
BAZ UltraStiff | The BAZ, Ultra-Stiff Z-Elevator Stage provides very stiff vertical motion with low angular errors and high resolution. Its unique design maintains a torsional stiffness of 4 x 10 5 N-m/rad and a later |
|
Micro-Z | Micro-Z stage is an ultra compact stage featuring a high performance 1.8 degree stepping motor with an integrated rotating nut. With travels up to 3 inches and numerous leadscrew options the Micro-Z f |
|
Z Elevator | The Z-Elevator Stages provide a very compact, accurate means of achieving vertical motion. Precision, non-recircu-lating ways in each of the four corners keep pitch and yaw below 15 arc-seconds over f |
|
Z Theta | The Z-Theta Stage adds a small angle theta-axis to our 0.5 inch travel Z-Elevator stage. This second axis adds only 15mm to the overall height, making the total collapsed eight of this two-axis assemb |
BAZ Ultra-stiff Z-Elevator Uni
Ultra Stiff Z-Elevator
Our BAZ Z-Elevator Stage provides very
stiff vertical motion with low angular errors and high resolution.
Its unique design maintains a torsional stiffness of 4 x 105
N-m/rad and a lateral stiffness of 1 x 107 N/m, making it ideal for
wafer positioning applications. Precision, crossed roller ways
support user loads up to 50 kg and keep angular runouts to 5
arc-seconds or less over the full 5mm travel.
Our BAZ stage incorporates a 23 frame motor (either stepper or
servo), coupled to a leadscrew or ballscrew which moves the center
section horizontally. A 20:1 wedge provides high resolution. A
flexure couples the top section to the base section, tightly
constraining motion in the XY plane while allowing vertical
motion.
A linear encoder may be mounted vertically, to maximize positional
accuracy, or horizontally, to provide a tighter servo loop and/or
higher resolution. Please see page 55 for resolution calculation
details.
-
High load capacity
-
High natural frequency
-
Ideal for use in applications which require low vibration during X-Y scans
Please down load Data Sheets at the base of this page for full product options and specifications
Z-Elevator Vertical Motion Units
Vertical Motion Stages
Our Z-Elevator Stages provide a very compact, accurate means of achieving vertical motion. Precision, non-recirculating ways in each of the four corners keep pitch and yaw below 15 arc-seconds over full travel. This way configuration provides very straight, smooth, and repeatable motion which is needed to satisfy demanding wafer inspection, scanning, and probing applications. Both 0.5 inch and 1.0 inch travel versions are available with collapsed heights of only 2.874 inches and 3.150 inches respectively. The users load is not cantilevered; it is fully supported by an 8" x 8" top plate. Our Z-Elevator Stages incorporate a 23 frame motor (either stepper or servo), coupled to a leadscrew which drives a cam-follower along a wedge. The wedge ratio is 2.5:1 for the ZE-5 and 1.25:1 for the ZE-10. This design provides high resolution, while our anti-backlash friction nut ensures excellent repeatability. Each stage includes precision Hall-effect limit switches, which terminate on convenient, locking D sub-mini connectors. The pitch of the leadscrew, the ratio of the wedge mechanism, the motor, and the controller together determine the resolution in our Z-Elevator stages. Please see page 55 for calculation details.
-
Low profile with no cantilevering
-
0.5" and 1" travel versions
-
Excellent straightness and repeatability
-
Anti-backlash friction nut
Please down load Data Sheets at the base of this page for full product options and specifications
Z-Theta Z-Elevator with Small Angle Theta
Z-Elevator with Small Angle Theta
Our Z-Theta Stage adds a small angle theta-axis to our 0.5 inch travel Z-Elevator stage. This second axis adds only 15mm to the overall height, making the total collapsed height of this two-axis assembly only 3.465". It is designed to accommodate varying sample thicknesses and provide theta alignment. The theta axis uses a leadscrew with a high repeatability friction nut as its drive mechanism while a decoupling device allows precise angular motion. Both axes incorporate 23 frame motors and Hall-effect limits with locking connectors.
-
0.5" vertical travel; ±4° theta travel
-
High repeatability, anti-backlash friction nuts
-
Low profile with no cantilevering
Please down load Data Sheets at the base of this page for full product options and specifications
Related Documents
| Title | Description | Size | Type | Download |
|---|---|---|---|---|
| BAZ Series | Technical Data | 615 KB | Portable Document Format (Adobe Acrobat) |
|
| Z Theta Series | Technical Data | 589 KB | Portable Document Format (Adobe Acrobat) |
|
| Z Elevator Stage Datasheet | Dover Z Elevator Stage Datasheet | 166 KB | Portable Document Format (Adobe Acrobat) |
|