XYR Crossed Roller Way XY

Crossed Roller Way X-Y Tables

The XYR Series is dimensionally identical to the XY Series with the exception of way construction. The XYR Series incorporates precision crossed roller ways for high load capacities and stiffness. Both series boast a monolithic design, which machines orthogonality into a low-profile, 3.5" high unit. This design attaches both motors to the center section, so they both move with the lower axis. Standard tables include motors, knobs, limit switches, and locking connectors.

• Precision crossed roller ways for high stiffness

• Low profile, monolithic design

• Travels from 2" x 2" to 10" x 10"

• Anti-backlash friction nuts

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XYL Large Crossed Roller Way XY

Crossed Roller Way X-Y Tables

The XYL Series utilizes crossed roller ways with 22mm tool steel rails and hardened, 9mm diameter rollers for very high stiffness and load capacity. This table's plate and riser design means the lower axis motor is mounted to the base and remains stationary, while the upper axis motor moves in one axis. The XYL Series uses 3/4" diameter leadscrews (larger than in the XY and XYR Series) to move heavier loads. These units include motors, knobs, couplings, Halleffect limit sensors, and locking motor and limit/encoder connectors. If the increased accuracy of linear encoders is desired, they are mounted next to the leadscrews to minimize Abbé error. Load capacities reflect the amount of force that each stage can withstand. Load distribution and choice of motors, leadscrews, and controls impact the load capacity.

• 12" x 12" to 27" x 27" travels

• Anti-backlash friction nuts

• Precision crossed roller ways for high load capacity

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XYRB Crossed Roller Table

Ballscrew Crossed Roller X-Y Table

DM-Dover XYRB crossed roller stages are low profile stages designed for a wide range of applications. Common uses include factory automation, microelectronics assembly, and laser machining. These tables use 3mm crossed roller ways and provide high stiffness. Precision ground preloaded ballscrews allow higher speeds than our leadscrew-driven XYRT tables. A specialized monolithic center couples the upper and lower axes, making the stage stiff and compact with machined in orthogonality. Both motors are mounted to the center section, so they move with the lower axis. Pitch cover protection is also standard, eliminating any safety concerns. Motors, knobs, couplings, adjustable halleffect limits, and locking connectors are included. Standard travels range from 2" x 2" to 10" x 10".

• Low profile, monolithic design

• Travels from 2" x 2" to 10" x 10"

• Precision crossed roller ways for high stiffness

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Ballscrew XYR Crossed Roller Way

Low Profile Wafer X-Y Tables

The Ballscrew XYR units are low profile X-Y Tables designed specifically for semiconductor wafer positioning. Other common applications include factory automation, microelectronics assembly, and laser machining. The XYR-1517 table is one of the industry's most versatile and popular stages. It was designed for 300mm semiconductor tools, while the XYR-1511 and XYR-1111 tables were designed for 200mm wafer positioning. The XYR- 1511 table provides extra travel for loading and unloading purposes. The XYR-1111 table is electroless nickel-plated and terminates all motor and limit/encoder signals on the center section. These tables use 6mm crossed roller ways to minimize errors and provide high stiffness. Precision ground ballscrews allow higher speeds than our leadscrew-driven XYR series tables. A specialized monolithic center couples the upper and lower axes, making the stage stiff and compact, and machining in orthogonality. Both motors are mounted to the center section, so they move with the lower axis. Motors, knobs, couplings, Hall-effect limits, and locking connectors are included.

• Ideal for wafer positioning

• Precision crossed-roller ways provide high stiffness

• High speed, precision ground ballscrews

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XYMR Series Microscope Table

Crossed Roller Way Microscope Table

• 3" diameter clear aperture for transmissive applications (solid top also available)

• High repeatability friction nuts

• Precision crossed-roller ways

• Super-thin cross section

• 6" x 6" travel

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X-ThetaT Single-Axis Crossed Roller Way with Theta

Low Profile, X-Theta Stage

The Low Profile X-Theta Stage provides two axes of motion in a stage body height of only 1.2 inches, making it ideal for various inspection applications, including wafer, CD, and hard drive media. The X (linear) axis includes crossed roller ways and a precision ground leadscrew with a spring-loaded friction nut to maximize flatness, straightness, and linear positioning accuracy. The theta (rotary) axis provides high speed rotation. It uses a belt drive to move at speeds up to 360 degrees/second. The ratio of the motor shaft rotation with respect to rotation of the rotary platter is 5.833:1. The resolution will be 0.03 degree with a 200 full step per revolution stepping motor and a divide-by-ten microstep drive. Both axes include a motor with a coupling and a knob for manual positioning. Hall-effect limit sensors prevent overtravel protection on the linear axis, and accurate position references for both axes. Locking motor and limit/encoder connectors are mounted to the same table section to simplify external cabling.

• Very thin cross section - only 1.2" high

• Precision crossed-roller ways on linear axis

• High speed belt-driven theta axis

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OFS Small Open Frame XY

Small, Open Frame X-Y Tables

The OFS Series of open frame X-Y tables combines low profile two-axis positioning with a clear aperture. These tables employ ball ways and feature a three-piece construction, which "machines-in" orthogonality. Since both motors are attached to the center section, they both move with the lower axis. The 1.5" x 1.5" clear aperture allows these tables to be used in applications requiring transmitted light, or twosided access to the user's part. The use of side-mounted leadscrews, with spring-loaded friction nuts, driven by 17 frame motors achieves a stage body thickness of only 1.5 inches. The motors include rear-shaft mounted knobs for manual control, and locking motor and limit/encoder connectors allow convenient attachment of cabling.

• Anti-backlash friction nuts

• Travels from 2" x 2" to 8" x 8"

• Thin cross-section with clear aperture

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OFL Large open Frame XY

Large, Open Frame X-Y Tables

The OFL Series provides increased travel and load bearing capacity in an open frame X-Y configuration. These tables address a wide range of precision positioning applications which require mechanical or optical, two-sided access. These include pin insertion, vision systems, optical gaging and inspection, water jet cutting, and biomedical assays. The OFL Series employs individually preloaded ball way construction, avoiding the difficulties inherent in establishing a preload across the table's open plates. This design also means that the lower axis motor is mounted to the base plate and remains stationary, while the upper axis motor moves in one axis. Side-mounted leadscrews, with anti-backlash friction nuts, are driven by 23 frame motors. This is a larger frame size motor than the XYMR and OFS series include.

• Clear aperture for two-sided access

• Anti-backlash friction nuts

• Travels from 8" x 8" to 25" x 25"

Please down load Data Sheets at the base of this page for full product options and specifications