Precision XY Stages and Tables from Heason Technology
Our Precision XY Tables & Stages range includes stepper and/or servo & screw, or direct drive linear motor driven with mechanical and/or air bearing.
DoverMotion has collaborated on the XY™ linear design by incorporating the motor and controller into the body of the stage resulting in the XYA™ Series Linear Stage.
The Ballscrew XYR units are low profile X-Y Tables designed specifically for semiconductor wafer positioning. Other common applications include factory automation, microelectronics assembly, and laser machining. The XYR-1517 table is one of the industry’s most versatile and popular stages. It was designed for 300mm semiconductor tools, while the XYR-1511 and XYR-1111 tables were designed for 200mm wafer positioning. The XYR- 1511 table provides extra travel for loading and unloading purposes. The XYR-1111 table is electroless nickel-plated and terminates all motor and limit/encoder signals on the center section.
DM-Dover XYRB crossed roller stages are low profile stages designed for a wide range of applications. Common uses include factory automation, microelectronics assembly, and laser machining. These tables use 3mm crossed roller ways and provide high stiffness.
The XYL Series utilizes crossed roller ways with 22mm tool steel rails and hardened, 9mm diameter rollers for very high stiffness and load capacity. This table’s plate and riser design means the lower axis motor is mounted to the base and remains stationary, while the upper axis motor moves in one axis.
The OFS Series of open frame X-Y tables combines low profile two-axis positioning with a clear aperture. These tables employ ball ways and feature a three-piece construction, which “machines-in” orthogonality.
The Microscope Stage brings automated, highly accurate X-Y positioning to a wide range of microscope-based applications including wafer, mask, and die inspection; cell counting and analysis; video profilometry; etc. The Microscope Stage utilizes crossed roller ways and precision ground leadscrews with anti-backlash nuts, resulting in exceptional flatness, straightness, and linear positioning accuracy.
Mini-Mag Stages deliver nearly twice the accuracy at virtually the same cost as competitive standard-grade options. Short lead times facilitate reduced time to market for equipment manufacturers or provide greater machine uptime for end users in production environments. The MMG will help you to build a better machine faster.
The DM-Dover MAG linear motor stage is a very compact, high performance, direct drive table suitable for use in a wide range of applications.The integral iron core direct drive linear motor features up to 5G acceleration and a peak force generation of 170N. Its high acceleration and force generation make it an ideal candidate for demanding life sciences, photonics, semiconductor, and disk positioning applications.
The Dover Airglide table combines the ultimate in performance, reliability and value. The stage design uses ultra precision air bearing ways providing extremely smooth motion, clean operation, and reliability. Its brushless linear servo motor allows for high speeds with no maintenance, making it ideal for use in high throughput applications.
The SAS Series single-axis shuttle stages provide high speed in a very compact design. The stage design uses recirculating bearings to minimize the overall moving envelope. Its brushless linear servo motor allows high speeds with smooth positioning, making it ideal for use in high throughput scanning applications.